Title: The influence of N containing plasmas on low-k films
Authors: Verdonck, Patrick ×
Aresti, M
Ferchichi, A
Van Besien, Els
Stafford, Ben
Trompoukis, Christos
De Roest, David
Baklanov, Mikhail #
Issue Date: 2011
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:88 issue:5 pages:627-630
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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