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Title: Probing nitride thin films in 3-dimensions using a variable energy electron beam
Authors: Trager-Cowan, C ×
Treguer, JF
Grimson, STF
Osborne, I
Barisonzi, M
Middleton, PG
Manson-Smith, SK
Mohammed, A
O'Donnell, KP
Van der Stricht, W
Jacobs, K
Moerman, I
Demeester, P
Wu, MF
Vantomme, André #
Issue Date: 1999
Publisher: Adam Hilger
Series Title: Institute of Physics Conference Series issue:161 pages:91-94
Abstract: The efficacy of electron beam analysis techniques to the investigation of both the structural and optical properties of nitride thin films in 3-dimensions is illustrated by the presentation of (i) CL spectroscopy of InGaN and AlGaN epilayers; (ii) CL imaging of an InGaN/GaN multiple quantum well (MQW) grown on an epitaxially lateral overgrown GaN (ELOG) layer; (iii) EBSD from a GaN epilayer.
ISSN: 0951-3248
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Department of Rehabilitation Sciences - miscellaneous
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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