Probing nitride thin films in 3-dimensions using a variable energy electron beam
Trager-Cowan, C Treguer, JF Grimson, STF Osborne, I Barisonzi, M Middleton, PG Manson-Smith, SK Mohammed, A O'Donnell, KP Van der Stricht, W Jacobs, K Moerman, I Demeester, P Wu, MF Vantomme, André #
Iop publishing ltd
Electron microscopy and analysis 1999 issue:161 pages:91-94
The efficacy of electron beam analysis techniques to the investigation of both the structural and optical properties of nitride thin films in 3-dimensions is illustrated by the presentation of (i) CL spectroscopy of InGaN and AlGaN epilayers; (ii) CL imaging of an InGaN/GaN multiple quantum well (MQW) grown on an epitaxially lateral overgrown GaN (ELOG) layer; (iii) EBSD from a GaN epilayer.