Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms vol:54 issue:4 pages:444-452
Strain and orientation in epitaxial CoSi2(111) layers formed by ion implantation have been studied by RBS/channeling and X-ray rocking curve measurements. For the thickness range (20-47 nm) of the epilayers studied, the average misalignment DELTA-PSI (PSI = 35.26-degrees) and perpendicular strain epsilon-x perpendicular-to are 0.30-degrees and -1.87% respectively, which shows that the strain in our epilayers is larger than in the thicker layers prepared by ion implantation and in the MBE grown layers with similar thickness range, but it is still far from a completely strained layer. Our results also confirm that a pure type A or predominant type A oriented epitaxial CoSi2 layer, which is rather difficult to prepare by the conventional UHV procedure, can easily be formed by ion implantation. However, for epilayer thicknesses lower than 36 nm, a correlation between the epilayer thickness and orientation is clearly present.