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Title: Formation of buried and surface cosi2 layers by ion-implantation
Authors: Wu, Mf ×
Vantomme, André
Pattyn, Hugo
Langouche, Guido
Maex, Karen
Vanhellemont, J
Vanacken, Johan
Vloeberghs, H
Bruynseraede, Yvan #
Issue Date: Jan-1990
Publisher: Elsevier science bv
Series Title: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms vol:45 issue:1-4 pages:658-663
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Solid State Physics and Magnetism Section
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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