Title: Pulsed-laser crystallization and doping for the fabrication of high-quality poly-si tfts
Authors: Fogarassy, E
Pattyn, Hugo
Elliq, M
Slaoui, A
Prevot, B
Stuck, R
Deunamuno, S
Mathe, El
Issue Date: May-1993
Publisher: Elsevier science bv
Series Title: Applied surface science vol:69 issue:1-4 pages:231-241
Abstract: We review the various applications of pulsed lasers, working in the nanosecond regime, to prepare high-quality poly-Si TFTs. It is shown that the best device performances (field-effect mobilities in excess of 140 cm2/V - s) are achieved by pulsed excimer laser crystallization of unhydrogenated amorphous Si thin films. In addition, for source and drain formation, we demonstrate that the excimer laser induced diffusion of dopant from a solid source (spin-on phosphorus-doped silicate glass) is very attractive to achieve good electrical properties of the n-channel TFTs.
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section

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