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Title: Probing nitride thin films in 3-dimensions using a variable energy electron beam
Authors: Trager-Cowan, C
McColl, D
Sweeney, F
Grimson, STF
Treguer, JF
Mohammed, A
Middleton, PG
Manson-Smith, SK
O'Donnell, KP
Van der Stricht, W
Moerman, I
Demeester, P
Wu, MF
Vantomme, André
Zubia, D
Hersee, SD #
Issue Date: 2000
Publisher: Materials research society
Series Title: MRS internet journal of nitride semiconductor research vol:5 Suppl. 1 pages:W5.10
Abstract: In this paper we illustrate the application of electron beam techniques to the measurement of strain, defect and alloy concentrations in nitride thin films. We present brief comparative studies of CL spectra of AlGaN and InGaN epilayers and EBSD patterns obtained from two silicon-doped 3 mum thick GaN epilayers grown on an on-axis (0001) sapphire substrate and a sapphire substrate misoriented by 10 degrees toward the m-plane (10 (1) over bar0).
ISSN: 1092-5783
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Nuclear and Radiation Physics Section
# (joint) last author

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