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Keywords:

ion-implantation, superlattices, radiation, particles, crystal, Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Physics, Applied, Materials Science, Physics, ION-IMPLANTATION, SUPERLATTICES, RADIATION, PARTICLES, CRYSTAL, 0303 Macromolecular and Materials Chemistry, 0912 Materials Engineering, 0913 Mechanical Engineering, Applied Physics, 4016 Materials engineering, 4018 Nanotechnology