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Title: A combined rutherford backscattering and auger-electron spectroscopy analysis of ni/au/te ohmic contacts to n-gaas
Authors: Wuyts, K
Watte, J
Silverans, Roger
Bender, H
Vanhove, M
Van Rossum, Marc
Issue Date: Mar-1991
Publisher: Amer inst physics
Series Title: Journal of vacuum science & technology b vol:9 issue:2 pages:228-235
Abstract: Rutherford backscattering spectrometry and Auger electron spectroscopy are combined to study the interdiffusion behavior in alloyed Ni/Au/Te/Ni/GaAs ohmic contacts. The data are correlated to the results of electrical measurements to allow for a discrimination between the different ohmic contact models. Good ohmic behavior is found to coincide with the presence of a thin (congruent-to 200 angstrom) Te-rich (5-10 at. %) layer in the substrate surface layers. This result and the diffusion data on nonohmic behaving contacts can most consistently be interpreted in the frame of the graded crystalline and/or amorphous heterojunction model.
URI: 
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Physics and Astronomy - miscellaneous
Solid State Physics and Magnetism Section

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