Title: Ion-beam synthesis of ternary phase cofe-silicide in (111)silicon
Authors: Tavares, J ×
Bender, H
Wu, Mf
Vantomme, André
Langouche, Guido
Lin, C #
Issue Date: Aug-1995
Publisher: Amer inst physics
Series Title: Applied Physics Letters vol:67 issue:7 pages:986-988
Abstract: A transmission electron microscopy (TEM) investigation is presented of ion beam synthesized buried CoFe-silicide prepared by sequential equal-dose implantations of both metals. The TEM analysis shows strong evidence for the formation of a metastable ternary Co0.5Fe0.5Si2 phase during the implantation. Annealing of these structures at 1000 degrees C results in the formation of a continuous buried layer, but phase separation occurs into B-oriented CoxFe1-xSi2 and twinned alpha-FexCo1-xSi2 (both with x close to 1). (C) 1995 American Institute of Physics.
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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