International Workshop 'Atomic Layer Deposition: Russia 2015', Date: 2015/01/01 - 2015/01/09, Location: Moscow Russia
Publication date:
2015-10-01
Pages:
16 -
17
Publisher:
MIPT
International Workshop 'Atomic Layer Deposition: Russia 2015'
Author:
Delabie, Annelies
Caymax, Matty ; Groven, Benjamin ; Heyne, Markus ; Haesevoets, Karel ; Meersschaut, Johan ; Nuytten, Thomas ; Bender, Hugo ; Conard, Thierry ; Verdonck, Patrick ; Van Elshocht, Sven ; Heyns, Marc ; Barla, Kathy ; Radu, Iuliana ; Thean, Aaron