Title: Impact of template residues on electrical properties of spin-on ultra low-k dielectrics
Authors: Krishtab, Mikhail
Afanasiev, Valeri
Stesmans, Andre
De Gendt, Stefan
Baklanov, Mikhaïl
Issue Date: 2015
Conference: 46th IEEE Semiconductor Interface Specialists Conference - SISC location:Arlington, VA USA date:2015-12-02
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Molecular Design and Synthesis
Semiconductor Physics Section

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