15th International Conference on Atomic Layer Deposition - ALD, Date: 2015/01/01 - 2015/01/06, Location: Portland, OR USA
Publication date:
2015-07-01
Publisher:
AVS
15th International Conference on Atomic Layer Deposition - ALD
Author:
Delabie, Annelies
Heyne, Markus ; Groven, Benjamin ; Haesevoets, Karel ; Meersschaut, Johan ; Nuytten, Thomas ; Verdonck, Patrick ; Van Elshocht, Sven ; Heyns, Marc ; Radu, Iuliana ; Caymax, Matty