Title: Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate dielectrics of AlGaN/GaN recessed gate D-mode MIS-HEMTs and E-mode MIS-FETs
Authors: Wu, Tian-Li
Marcon, Denis
De Jaeger, Brice
Van Hove, Marleen
Bakeroot, Benoit
Stoffels, Steve
Groeseneken, Guido
Decoutere, Stefaan
Roelofs, Robin
Issue Date: 2015
Host Document: IEEE International Reliability Physics Symposium - IRPS pages:6C.4
Conference: IEEE International Reliability Physics Symposium - IRPS location:Monterey, CA USA date:2015-04-19
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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