Title: Impact of carbon-doping on time dependent dielectric breakdown of SiO2-based films
Authors: Zhao, Larry
Barbarin, Yohan
Croes, Kristof
Baklanov, Mikhaïl
Verdonck, Patrick
Tokei, Zsolt
Claeys, Cor
Issue Date: 2015
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:106 issue:7 pages:072902
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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