15th International Conference on Atomic Layer Deposition - ALD, Date: 2015/01/01 - 2015/01/06, Location: Portland, OR USA
Publication date:
2015-01-01
15th International Conference on Atomic Layer Deposition - ALD
Author:
Groven, Benjamin
Heyne, Markus ; Haesevoets, Karel ; Meersschaut, Johan ; Nuytten, Thomas ; Conard, Thierry ; Verdonck, Patrick ; Van Elshocht, Sven ; Heyns, Marc ; Radu, Iuliana ; Delabie, Annelies ; Caymax, Matty