Title: Impact of sequential infiltration synthesis on pattern fidelity of DSA lines
Authors: Singh, Arjun
Knaepen, Werner
Sayan, Safak
El Otell, Ziad
Chan, BT
Maes, Jan
Gronheid, Roel
Issue Date: 2015
Host Document: Advances in Patterning Materials and Processes XXXII pages:94250N
Conference: Advances in Patterning Materials and Processes XXXII location:San Jose, CA USA date:2015-02-22
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
Molecular Design and Synthesis

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