ITEM METADATA RECORD
Title: Post-etch template removal strategy for reduction of plasma induced damage in spin-on OSG low-k dielectrics
Authors: Krishtab, Mikhail
Vanstreels, Kris
Baklanov, Mikhaïl
De Gendt, Stefan
Issue Date: 2015
Host Document: IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM pages:103-106
Conference: IEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM location:Grenoble France date:2015-05-18
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis

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