Title: Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
Authors: Doise, Jan
Bekaert, Joost
Chan, BT
Gronheid, Roel
Cao, Yi
Hong, Sung Eun
Lin, Guanyang
Fishman, Daniel
Chakk, Yuli
Marzook, Taisir
Issue Date: 2015
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:33 issue:6 pages:06F301
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous

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