Low-temperature pre-epitaxy surface cleaning of Si and SiGe

Profijt, Harald; Suhard, Samuel; Rosseel, Erik; Tolle, John; Mertens, Hans; Dhayalan, Sathish Kumar; Hikavyy, Andriy; Weeks, Doran; Holsteyns, Frank; Loo, Roger; Mehta, Sandeep; Maes, Jan

9th International Conference on Silicon Epitaxy and Heterostructures - ICSI9, Date: 2015/01/01 - 2015/01/05, Location: Montreal Canada

Publication date: 2015-05-01

Low-temperature pre-epitaxy surface cleaning of Si and SiGe

Author:

Profijt, Harald

Suhard, Samuel ; Rosseel, Erik ; Tolle, John ; Mertens, Hans ; Dhayalan, Sathish Kumar ; Hikavyy, Andriy ; Weeks, Doran ; Holsteyns, Frank ; Loo, Roger ; Mehta, Sandeep ; Maes, Jan