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Title: Ozone-based atomic layer deposition of Gd2O3 from tris(isopropyl-cyclopentadienyl) gadolinium: growth characteristics and surface chemistry
Authors: Han, Jeong Hwan
Delabie, Annelies
Franquet, Alexis
Conard, Thierry
Van Elshocht, Sven
Adelmann, Christoph
Issue Date: Dec-2015
Publisher: Verlag GmbH & Co. KGaA
Series Title: Chemical Vapor Deposition vol:21 issue:10_12 pages:352-359
ISSN: 0948-1907
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Quantum Chemistry and Physical Chemistry Section

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