Title: Composition analysis of III-V materials grown in nanostructures for semiconductor applications: the self focusing SIMS approach
Authors: Franquet, Alexis
Douhard, Bastien
Merckling, Clement
Conard, Thierry
Vandervorst, Wilfried
Issue Date: 2015
Conference: 20th International Conference on Secondary Ion Mass Spectrometry - SIMS XX location:Seattle, WA USA date:2015-09-13
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Nuclear and Radiation Physics Section

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