Composition analysis of III-V materials grown in nanostructures for semiconductor applications: the self focusing SIMS approach

20th International Conference on Secondary Ion Mass Spectrometry - SIMS XX, Date: 2015/01/01 - 2015/01/09, Location: Seattle, WA USA

Publication date: 2015-01-01

Composition analysis of III-V materials grown in nanostructures for semiconductor applications: the self focusing SIMS approach

Author:

Franquet, Alexis

Douhard, Bastien ; Merckling, Clement ; Conard, Thierry ; Vandervorst, Wilfried