Title: Study of the trapping of Co-Fe impurities at the internal wall of nanosized Si voids
Authors: Deweerd, W ×
Barancira, T
Langouche, Guido
Milants, K
Moons, R
Verheyden, Joris
Pattyn, Hugo #
Issue Date: Dec-1996
Publisher: Elsevier science bv
Series Title: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms vol:120 issue:1-4 pages:51-55
Abstract: The trapping of transition metal impurities to cavities in c-Si recently attracted much interest, stemming from the possibility to use the process for proximity gettering. Mossbauer spectroscopy is employed on ion-implanted Co-57/Fe-57 to elucidate the nature of the site of the impurity atom at the internal surface of the voids. We observe a trapping effect upon thermal treatment, hampering normal silicide formation. Also a pre-existing silicide phase can be partially dissolved in favour of cavity trapping. The binding energy for cavity trapping is found to be lower than for silicide formation.
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Research Unit Biblical Studies
Mechanical Engineering Technology TC, Technology Campus De Nayer Sint-Katelijne-Waver
Technologiecluster Werktuigkundige Industriƫle Ingenieurstechnieken
× corresponding author
# (joint) last author

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