Title: HREM characterization of ion beans synthesized ternary silicides in (111) silicon
Authors: Tavares, J ×
Bender, H
Wu, MF
Vantomme, André
Langouche, Guido
Lin, C #
Issue Date: 1995
Publisher: Adam Hilger
Series Title: Institute of Physics Conference Series vol:146 pages:533-536
Abstract: Buried ternary NiFe- and CoFe-silicides are synthesized by sequential equal-dose implantations of both metals. TEM analysis shows strong evidence for the formation of a metastable Ni0.5Fe0.5Si2 and Co0.5Fe0.5Si2 phase during the implantation. Annealing of these structures results in the formation of a continuous buried layer in which almost full phase separation occurs in case of the CoFe-silicide, while only the onset of phase separation is found for the NiFe-silicide.
ISSN: 0951-3248
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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