Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms vol:203 pages:158-163
Modeling of the electronic processes during sputtering of metals is presented in the framework of the resonant electron transfer (RET) model. The population partition and the state-selective velocity distributions of Co atoms sputtered in the ground and metastable states from polycrystalline foils re used for the interpretation. The experimental observations are in qualitative agreement with the trends predicted by the RET model. Furthermore, we show that the data on Co are in quantitative agreement with the outcome of a multilevel rate equation approach of the RET model. (C) 2003 Elsevier Science B.V. All rights reserved.