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Title: Multilayer MoS2 Growth by Metal and Metal Oxide Sulfurization
Authors: Heyne, Markus ×
Chiappe, Daniele
Meersschaut, Johan
Nuytten, Thomas
Conard, Thierry
Bender, Hugo
Huyghebaert, Cedric
Radu, Iuliana P.
Caymax, Matty
de Marneffe, Jean-Francois
Neyts, Erik C.
De Gendt, Stefan #
Issue Date: 5-Jan-2016
Publisher: R S C Publications
Series Title: Journal of Materials Chemistry C issue:4 pages:1295-1304
Abstract: We investigated the deposition of MoS2 multilayers on large area substrates. The pre-deposition of metal or metal oxide with subsequent sulfurization is a promising technique to achieve layered films. We distinguish a different reaction behavior in metal oxide and metallic films and investigate the effect of the temperature, the H2S/H2 gas mixture composition, and the role of the underlying substrate on the material quality. The results of the experiments suggest a MoS2 growth mechanism consisting of two subsequent process steps. At first, the reaction of the sulfur precursor with the metal or metal oxide occurs, requiring higher temperatures in the case of metallic film compared to metal oxide. At this stage, the basal planes assemble towards the diffusion direction of the reaction educts and products. After the sulfurization reaction, the material recrystallizes and the basal planes rearrange parallel to the substrate to minimize the surface energy. Therefore, substrates with low roughness show basal plane assembly parallel to the substrate. These results indicate that the substrate character has a significant impact on the assembly of low dimensional MoS2 films.
ISSN: 2050-7526
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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multilayerMoS2.pdfAccepted Manuscript Accepted 2166KbAdobe PDFView/Open
authorreprints_MoS2_sulfurization.pdf Published 3703KbAdobe PDFView/Open

 


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