Applied Physics Letters
Publication date:
2001-03-01
Volume:
78
Pages:
1451 -
1452
DOI:
10.1063/1.1352690
Publisher:
Amer inst physics
Author:
Stesmans, Andre
Afanas'ev, Valeri
Keywords:
100 silicon-wafers, thermal (100)si/sio2, interface, resonance, defects, features, Science & Technology, Physical Sciences, Physics, Applied, Physics, 100 SILICON-WAFERS, THERMAL (100)SI/SIO2, INTERFACE, RESONANCE, DEFECTS, FEATURES, 02 Physical Sciences, 09 Engineering, 10 Technology, Applied Physics, 40 Engineering, 51 Physical sciences