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Applied Physics Letters

Publication date: 2001-03-01
Volume: 78 Pages: 1451 - 1452
Publisher: Amer inst physics

Author:

Stesmans, Andre
Afanas'ev, Valeri

Keywords:

100 silicon-wafers, thermal (100)si/sio2, interface, resonance, defects, features, Science & Technology, Physical Sciences, Physics, Applied, Physics, 100 SILICON-WAFERS, THERMAL (100)SI/SIO2, INTERFACE, RESONANCE, DEFECTS, FEATURES, 02 Physical Sciences, 09 Engineering, 10 Technology, Applied Physics, 40 Engineering, 51 Physical sciences