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Title: Crystal structure characterization of ion-beam-synthesized CoxY1-xSi1.7 silicide
Authors: Wu, MF ×
Vantomme, André
Hogg, Susan
Pattyn, Hugo
Langouche, Guido #
Issue Date: May-1999
Publisher: Amer inst physics
Series Title: Journal of Applied Physics vol:85 issue:9 pages:6929-6931
Abstract: Heteroepitaxial ternary CoxY1-xSi1.7 silicide (x > 0.27) has been formed by Co implantation into YSi1.7/Si(111). The formation of this compound is confirmed by an x-ray symmetric theta-2 theta scan. However, the theta-2 theta scan alone cannot discriminate between the possible phases (tetragonal, orthorhombic, or hexagonal) of this compound. On the other hand, Rutherford backscattering (RBS)/channeling confirms that this silicide is hexagonal and that its azimuthal orientation is CoYSi1.7[0001]//Si[111] and CoYSi1.7{$11 (2) over bar 0}//Si{110}. In addition, the lattice constants of the ternary silicide a(epi) = 0.3989 nm (which means that the lattice mismatch is 3.9% relative to the Si substrate! and c(epi) = 0.3982 nm have been determined by RBS/channeling and x-ray diffraction. (C) 1999 American Institute of Physics. [S0021-8979(99)09709-1].
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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