Title: Trapping of ion-implanted Co-57 to cavities in c-Si: A qualitative study
Authors: Deweerd, W ×
Moons, R
Milants, K
Verheyden, Joris
Langouche, Guido
Pattyn, Hugo #
Issue Date: May-1997
Publisher: Elsevier science bv
Series Title: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms vol:127 pages:307-310
Abstract: We observe a pronounced dose dependence in the trapping of Co to the internal surface of nanosized cavities in c-Si. Mossbauer spectroscopy shows that cavity trapping is most explicit for low Co contamination levels (< 5 x 10(13) at/cm(2)). For high quantities (> 5 x 10(14) at/cm(2)), silicide formation becomes predominant at first and then subsequently partially dissolves upon prolonged annealing at temperatures exceeding 750 degrees C. In the intermediate region, a clear starting situation is only reached after several annealing steps. Again Co gets trapped at the cavities, reaching essentially an identical level as for the low dose case. For the low and intermediate dose case, the onset of cavity trapping is followed in detail, showing that a large initial fraction of weakly surface bound Co depopulates in favor of the formation of small CoSi2 precipitates in the vicinity of the voids, Subsequently, this CoSi2 phase then partially dissolves in favor of strongly surface bound Co.
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Research Unit Biblical Studies
Mechanical Engineering Technology TC, Technology Campus De Nayer Sint-Katelijne-Waver
Technologiecluster Werktuigkundige Industriƫle Ingenieurstechnieken
× corresponding author
# (joint) last author

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