Title: Characterization of high and low k dielectrica using low-energy Time of Flight Elastic Recoil Detection
Authors: Brijs, B ×
Sajavaara, Timo Pekka
Giangrandi, Simone
Arstila, K
Vantomme, André
Vandervorst, Wilfried #
Issue Date: Jun-2005
Publisher: Elsevier science bv
Series Title: Microelectronic Engineering vol:80 pages:106-109
Abstract: A low-energy Time of Flight Elastic Recoil Detection set-up has been developed for the characterization of ultra-thin films, e.g. high and low k dielectrica. The performance is demonstrated by sample analysis of low k materials as they normally contain H, C, O, and Si. The excellent depth resolution is shown on a 6 ran HfSiO and a multistack of 6 ran SiO2, 6 nin Si3N4, 2 mn SO2 on top of Si.
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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