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Title: Iii-v on dissimilar substrates - epitaxy and alternatives
Authors: Borghs, Gustaaf
Deboeck, J
Pollentier, I
Demeester, P
Brys, C
Dobbelaere, W #
Issue Date: 1994
Publisher: Iop publishing ltd
Host Document: Gallium arsenide and related compounds 1993 vol:136 issue:136 pages:441-448
Abstract: Heteroepitaxial growth and thin film transfer are two techniques for the integration of III-V technologies on dissimilar substrates. Crystalline quality remains the issue for heteroepitaxial layers of III-V's on Si. Quality improving techniques are discussed. Stress in the thin epitaxial film is another point of concern but recent progress has alleviated this problem to some extend.
ISSN: 0951-3248
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Physics and Astronomy - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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