Title: Tem study of embedded mbe gaas growth on (001) silicon substrates
Authors: Vanhellemont, J
Deboeck, J
Borghs, Gustaaf
Mertens, R #
Issue Date: 1989
Publisher: Iop publishing ltd
Series Title: Institute of physics conference series issue:100 pages:109-114
Abstract: Both planar and embedded molecular beam epitaxial (MBE) growth of GaAs on (001) silicon substrates are studied. The influence of different substrate cleaning procedures is investigated for the planar growth procedure. HVEM and HREM are used to investigate the GaAs/Si interface quality and the defects in the GaAs layers.
ISSN: 0951-3248
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physics and Astronomy - miscellaneous
# (joint) last author

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