Title: Investigation of titanium nitride coating by broadband laser ultrasonic spectroscopy
Authors: Gao, WM ×
Glorieux, Christ
Lauriks, Walter
Thoen, Jan #
Issue Date: Feb-2002
Publisher: Chinese physical soc
Series Title: Chinese physics vol:11 issue:2 pages:132-138
Abstract: We present a laser ultrasonic method to investigate a titanium nitride (TiN) coating specimen. The technique is based on the principle of surface acoustic wave (SAW) dispersion during acoustic propagation on a half-space with the presence of a thin layer. Due to the high efficiency of laser line-source excitation, we have been able to generate and detect a SAW with an excellent signal-to-noise ratio in a wide frequency band. An inverse fitting algorithm was employed to extract simultaneously the thickness and the elastic parameters of the TiN coating from the experimental SAW velocity dispersion curve.
ISSN: 1009-1963
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Soft Matter and Biophysics
× corresponding author
# (joint) last author

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