Title: Submicron processing of InAs based quantum wells: A new, highly selective wet etchant for AlSb
Authors: Morpurgo, AF
vanWees, BJ
Klapwijk, TM
Borghs, Gustaaf #
Issue Date: Mar-1997
Publisher: Amer inst physics
Series Title: Applied Physics Letters vol:70 issue:11 pages:1435-1437
Abstract: We describe a processing technology for patterning InAs/AlSb heterostructures far in the submicron regime. The processing is based on a new, highly selective wet etchant for AlSb. We discuss the electrical characterization of narrow ballistic channels (down to approximate to 140 nm width) realized with present technology, and demonstrate that the processing preserves the high mobility of the material. (C) 1997 American Institute of Physics.
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physics and Astronomy - miscellaneous
# (joint) last author

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