|ITEM METADATA RECORD
|Title: ||Comparative-study of low-temperature poly-si tfts obtained by various crystallization techniques for use in active matrix lcds|
|Authors: ||Pattyn, Hugo|
|Issue Date: ||Sep-1992 |
|Publisher: ||Elsevier science bv|
|Series Title: ||Microelectronic engineering vol:19 issue:1-4 pages:97-100|
|Abstract: ||Based on the electrical characteristics of low temperature poly-Si TFTs, various crystallization methods for the formation of the poly-Si bulk layer are evaluated.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Nuclear and Radiation Physics Section|
ESAT - ELECTA, Electrical Energy Computer Architectures
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