Title: Comparative-study of low-temperature poly-si tfts obtained by various crystallization techniques for use in active matrix lcds
Authors: Pattyn, Hugo
Poortmans, J
Debenest, P
Caymax, M
Vetter, P
Elliq, M
Fogarassy, E
Nenyei, Z
Nijs, Johan
Mertens, R
Issue Date: Sep-1992
Publisher: Elsevier science bv
Series Title: Microelectronic engineering vol:19 issue:1-4 pages:97-100
Abstract: Based on the electrical characteristics of low temperature poly-Si TFTs, various crystallization methods for the formation of the poly-Si bulk layer are evaluated.
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section
ESAT - ELECTA, Electrical Energy Computer Architectures

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