Title: Ecr-plasma assisted laser ablation of as-deposited superconducting thin-films for application in microelectronics
Authors: Deneffe, K
Vanmieghem, P
Brijs, B
Vandervorst, Wilfried
Mertens, R
Borghs, Gustaaf #
Issue Date: Oct-1990
Publisher: Elsevier science sa lausanne
Series Title: Journal of the less-common metals vol:164 pages:307-314
ISSN: 0022-5088
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physics and Astronomy - miscellaneous
Nuclear and Radiation Physics Section
# (joint) last author

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