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Title: The structure and composition of layers obtained by ion-beam mixing in the ti/si and co/si systems
Authors: Maex, Karen
Dekeersmaecker, Rf
Van Rossum, Marc
Vanderweg, Wf
Krooshof, G
Issue Date: Feb-1987
Publisher: Elsevier science bv
Series Title: Nuclear instruments & methods in physics research section b-beam interactions with materials and atoms vol:19-2 pages:731-736
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Physics and Astronomy - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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