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Title: Low-angle x-ray-diffraction of multilayered structures
Authors: Vanderstraeten, Hans ×
Neerinck, Dominique
Temst, Kristiaan
Bruynseraede, Yvan
Fullerton, Ee
Schuller, Ik #
Issue Date: Oct-1991
Publisher: Munksgaard int publ ltd
Series Title: Journal of Applied Crystallography vol:24 pages:571-575
Abstract: Low-angle X-ray diffraction profiles can provide detailed information about the multilayer periodicity and thickness of the individual layers that make up a multilayer. The effect of discrete and continuous random cumulative fluctuations of the layer thicknesses on the diffraction profiles of single films, bilayers and multilayers is discussed. It is shown that the calculated low-angle profiles of single films can distinguish between discrete and continuous thickness errors. In bilayers and multilayers, however, no difference between these thickness errors can be seen and only an overall thickness error may be extracted.
ISSN: 0021-8898
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Solid State Physics and Magnetism Section
Faculty of Science, Campus Kulak Kortrijk
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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