Journal of Applied Physics vol:92 issue:3 pages:1317-1328
Electron spin resonance studies have been carried out on the isothermal passivation kinetics in 1 atm molecular H-2 of trivalent Si traps (P(b)s;Si-3=Si-.) at the interface of thermal (111)/Si/SiO2 as a function of oxidation temperature T-ox in the range 250-1100 degreesC. Interpretation within the generalized simple thermal (GST) passivation model, based on first-order interaction kinetics, reveals a distinct increase in spread sigmaE(f) in the activation energy for passivation E-f with decreasing T-ox (similar to3 times in the covered T-ox window), while the other key kinetic parameters (E-f, preexponential factor) remain essentially unchanged. The variation in sigmaE(f) is ascribed to differently relaxed interfacial stress, affecting the spread in P-b defect morphology. In a second analytic part, the impact of the variation in E-f, and correlatively in the activation energy E-d for PbH dissociation, on P-b-hydrogen interaction kinetics is assessed within the GST-based full interaction scheme, describing parallel competing action of passivation and dissociation. In particular, the passivation behavior in 1 atm H-2 of an initially exhaustively depassivated P-b system, is analyzed exposing, as a major result, that growing spreads sigmaE(f), sigmaE(d) result in a drastic reduction in passivation efficiency (drop by four orders of magnitude for a threefold increase in sigmaE(f)). For sigmaE(f)/E(f)greater than or similar to20%, the P-b system cannot be inactivated beyond the 90% level, incompatible with device quality requirements. Heating time/temperature vs spread conditions for optimum passivation in H-2 have been established, and the technological impact of altering sigmaE(f), sigmaE(d) is discussed. At film edges and trench corners, which are vulnerable local regions of exces stress, and hence enhanced sigmaE(f), sigmaE(d), an edge defeat effect with respect to passivation is exposed. Within the relentless scaling of Si-based integrated circuit devices, the growing relative impact of edge regions may jeopardize proper passivation of interface traps in the conventional way in future device generations. (C) 2002 American Institute of Physics.