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Title: The impact of the gate dielectric quality in developing Au-free D-mode and E-mode recessed gate AlGaN/GaN transistors on a 200mm Si substrate
Authors: Wu, Tian-Li ×
Marcon, Denis
De Jaeger, Brice
Van Hove, Marleen
Bakeroot, Benoit
Lin, Dennis
Stoffels, Steve
Kang, Xuanwu
Roelofs, Robin
Groeseneken, Guido
Decoutere, Stefaan #
Issue Date: 10-May-2015
Host Document: International Symposium on Power Semiconductor Devices & IC's (ISPSD) pages:225-228
Conference: International Symposium on Power Semiconductor Devices & IC's (ISPSD) date:10-14 May 2015
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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