Evolution of the crystal size and shape and its effect on film resistivity during the growth of ultrathin SiGe films by CVD

2nd Saudi International Nanotechnology Conference, Date: 2012/11/01 - 2012/11/01, Location: Riyadh, Saudi Arabia

Publication date: 2012-01-01

Proc. 2nd Saudi International Nanotechnology Conference

Evolution of the crystal size and shape and its effect on film resistivity during the growth of ultrathin SiGe films by CVD

Author:

Asafa, TB

Bryce, G ; Said, SAM ; Witvrouw, Ann