Title: Mesoscopic electronic devices made by local oxidation of a Ti/Au bilayer film
Authors: Ahlskog, M
Vullers, R
Cannaerts, Maarten
Van Haesendonck, Christian #
Issue Date: Jul-2000
Publisher: Elsevier science bv
Series Title: Physica B vol:284 Part 2 pages:1838-1839
Abstract: The technique of field-induced local oxidation with the tip of an atomic force microscope can be used to pattern non-noble metal thin films by creating insulating regions. We have studied the technique (oxide line width, oxidation thickness, etc.) in order to fabricate mesoscopic electronic devices. Ti thin film structures have been patterned as well as more complicated structures where the Ti covers gold islands. (C) 2000 Elsevier Science B.V. All rights reserved.
ISSN: 0921-4526
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Solid State Physics and Magnetism Section
# (joint) last author

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