Title: Lattice sites of implanted Fe in Si
Authors: Wahl, Ulrich
Correia, JG
Rita, E
Araujo, JP
Soares, JC
Issue Date: Jul-2005
Publisher: American physical soc
Series Title: Physical Review B vol:72 issue:1 pages:-
Abstract: The angular distribution of beta(-) particles emitted by the radioactive isotope Fe-59 was monitored following implantation into Si single crystals at fluences from 1.4 x 10(12) cm(-2) to 1 x 10(14) cm(-2). We identified Fe on three distinct sites: ideal substitutional, displaced substitutional and displaced tetrahedral interstitial. Whereas displaced substitutional Fe was dominating for annealing temperatures below 500 degrees C, annealing between 500-700 degrees C caused the majority of Fe to occupy displaced tetrahedral interstitial sites. Ideal substitutional positions were increasingly populated following annealing at 800 degrees C and above. A comparison of the emission channeling results to Mossbauer and electron paramagnetic resonance experiments is given.
ISSN: 1098-0121
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Non-KU Leuven Association publications

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