Title: Lattice sites of implanted Fe in Si
Authors: Wahl, Ulrich ×
Correia, JG
Rita, E
Araujo, JP
Soares, JC #
Issue Date: Jul-2005
Publisher: American Physical Society
Series Title: Physical Review B vol:72 issue:1
Article number: 014115
Abstract: The angular distribution of beta(-) particles emitted by the radioactive isotope Fe-59 was monitored following implantation into Si single crystals at fluences from 1.4 x 10(12) cm(-2) to 1 x 10(14) cm(-2). We identified Fe on three distinct sites: ideal substitutional, displaced substitutional and displaced tetrahedral interstitial. Whereas displaced substitutional Fe was dominating for annealing temperatures below 500 degrees C, annealing between 500-700 degrees C caused the majority of Fe to occupy displaced tetrahedral interstitial sites. Ideal substitutional positions were increasingly populated following annealing at 800 degrees C and above. A comparison of the emission channeling results to Mossbauer and electron paramagnetic resonance experiments is given.
ISSN: 2469-9950
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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