Title: Improved quantification and detection limits for oxygen analysis in alxga1-xas/gaas multilayers with secondary ion mass-spectroscopy
Authors: Meuris, M
Vandervorst, Wilfried
Borghs, Gustaaf #
Issue Date: May-1989
Publisher: Amer inst physics
Series Title: Journal of vacuum science & technology a-vacuum surfaces and films vol:7 issue:3 pages:1663-1672
ISSN: 0734-2101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physics and Astronomy - miscellaneous
Nuclear and Radiation Physics Section
# (joint) last author

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