Title: Sputtering of metals: Probing and modelling the emission of atoms in different electronic states
Authors: Silverans, Roger
Bastiaansen, Jeroen
Philipsen, Vicky
Vandeweert, Erno
Lievens, Peter #
Issue Date: Aug-2001
Publisher: Elsevier science bv
Series Title: Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms vol:182 pages:127-134
Abstract: This paper deals with the investigation of electronic processes involved in the emission of neutral atoms during keV ion-beam sputtering of metals, We first present an experimental study of Ar+ ion-beam sputtering of clean, polycrystalline metals. Atoms emitted in the ground and metastable states are probed using double-resonant laser ionization. These efficient probing schemes allow the quantitative determination of population partitions as well as state-specific, kinetic-energy (KE) distributions. Experimental data on the sputtering of Co, Ni, Cu, Sr and Ag are reported. In the second part of this article it is shown that the en-.Lission of neutral atoms during sputtering of metals can be modelled as follows: as a result of the collision cascade created by the incoming particles, a sputtered particle escapes from the surface as a positive ion and becomes neutralized by resonant transfer of an electron from the valence band of the metal. A qualitative description of this multichannel electron transfer process is given, explaining the main observations of these sputtering studies. (C) 2001 Elsevier Science B.V. All rights reserved.
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Solid State Physics and Magnetism Section
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science