Title: Dynamic error reduction of a nanometre-accurate Abbe-compliant position measurement system
Authors: Bosmans, Niels
Qian, Jun
Reynaerts, Dominiek
Issue Date: 1-Jun-2015
Publisher: euspen
Host Document: Proceedings of the 15th international conference of the european society of precision engineering and nanotechnology
Conference: 15th international conference & exhibition of the European Society for Precision Engineering & Nanotechnology edition:15 location:Leuven date:1-5 June 2015
Article number: O3.8
Abstract: Ultra-precision machine tools can be brought to higher accuracies by fully exploiting precision engineering design principles. For that reason, a linear encoder-based measurement system called ‘moving-scale’ has been developed, compliant with the Abbe-principle and allowing functional separation of the metrology and structural loop. Previous work showed that the thermo-mechanical stability of a 1-DOF system with a measurement length of 120 mm was 18 nm for temperature changes of ±0.5 °C. This paper describes the characterisation of the dynamic errors occurring during measurement of the position of a moving target surface. The largest error sources have been identified and reduced and were experimentally verified in a dedicated setup where the moving-scale position measurement was compared to that of a stable reference. The measurement uncertainty related to these dynamic errors has been shown to be 5 nm, which brings the total measurement uncertainty of the 1-DOF moving-scale measurement system to 21 nm.
ISBN: 978-0-9566790-7-9
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section

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