ITEM METADATA RECORD
Title: Identification of substitutional and interstitial co implanted in si
Authors: Langouche, Guido ×
Depotter, M #
Issue Date: Feb-1987
Publisher: Elsevier science bv
Series Title: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms vol:19-2 pages:322-324
URI: 
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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