Title: Tem study of mbe gaas growth on silicon substrates
Authors: Vanhellemont, J
Deboeck, J
Aharoni, H
Borghs, Gustaaf #
Issue Date: 1988
Publisher: Iop publishing ltd
Series Title: Institute of physics conference series issue:93 pages:79-80
Abstract: MBE growth of GaAs on (001) silicon substrates is studied as a function of substrate cleaning procedures. HVEM and HREM are used to investigate the GaAs/Si interface quality and the defects in the epitaxial GaAs layers.
ISSN: 0951-3248
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physics and Astronomy - miscellaneous
# (joint) last author

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