Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms vol:136-138 pages:744-750
Electron emission channeling allows direct lattice location studies of low doses of radioactive atoms implanted in single crystals. For that purpose the anisotropic emission yield of conversion electrons from the crystal surface is measured, most conveniently by use of position-sensitive detectors. We discuss characteristic features of this method, including quantitative data analysis procedures, which are achieved by fitting simulated two-dimensional emission distributions for different lattice sites to the experimental patterns. The capabilities of this approach are illustrated by the case of rare earth atoms (Er, Tm, Yb) in Si, where we were able to do lattice location experiments down to implanted doses which are 150 times lower compared to previous RES studies. (C) 1998 Elsevier Science B.V.