Title: Irradiation-induced damage in porous low-k materials during low-energy heavy-ion elastic recoil detection analysis
Authors: Giangrandi, Simone ×
Brijs, B
Sajavaara, T
Bender, H
Iacopi, F
Vantomme, André
Vandervorst, Wilfried #
Issue Date: Aug-2006
Publisher: North-Holland Physics Pub.
Series Title: Nuclear Instruments & Methods in Physics Research B vol:249 pages:189-192
Abstract: With the implementation of time-of-flight elastic recoil detection (ToF-ERD) for the analysis of thin films with high depth resolution using a standard 'low-energy' accelerator, routine application of ERD in semiconductor technology becomes possible. In case of irradiation-sensitive materials, like organosilicate low-k films, the energetic incident beam damages the sample during the measurement, resulting in loss of the lighter elements and, as a consequence, altering the sample composition.
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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