Title: Analysis of thin high-k and silicide films by means of heavy ion time-of-flight forward-scattering spectrometry
Authors: Sajavaara, T ×
Brijs, B
Giangrandi, Simone
Arstila, Kai
Vantomme, André
Vandervorst, Wilfried #
Issue Date: Aug-2006
Publisher: North-Holland Physics Pub.
Series Title: Nuclear Instruments & Methods in Physics Research B vol:249 pages:292-296
ISSN: 0168-583X
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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